Manufatura de microelementos ópticos difrativos
Data
2017-11-15
Autores
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Biblioteca Digital de Teses e Dissertações da USP
Universidade de São Paulo
Escola de Engenharia de São Carlos
Universidade de São Paulo
Escola de Engenharia de São Carlos
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Os elementos ópticos difrativos representam um mercado em franco crescimento, da ordem de bilhões de dólares. Seu uso ostensivo está nos microeletrônicos, sistemas de iluminação, telecomunicações, equipamentos de segurança e outros. Por isso, esta tese teve como objetivo realizar investigação pública profunda no assunto. Insertos de cobre eletrolítico foram usados por proporcionar excelente acabamento superficial quando usinados com ferramenta de diamante monocristalino obtendo valores de Ra = 10,2 nm, Rq = 13,56 e Rt = 363,06 µm e para o aço inoxidável polido os resultados foram de Ra = 7,02 nm, Rq = 9,05 nm e Rt = 225,19 nm. As réplicas foram construídas em PMMA - DH ECL P com transmitância da luz avaliada em aproximadamente 90% em todo o espectro visível e infravermelho. Foram produzidos sete tipos de microelementos ópticos difrativos, baseados na geometria de Fresnel e nos arranjos de microlentes esféricas. Foi necessário desenvolver o código computacional denominado LF2010 para auxiliar a construção do projeto das microlentes anesféricas de Fresnel e calcular sua modulação de fase. Quatro processos determinísticos na fabricação dos µEODs foram usados: torneamento de ultraprecisão com ferramenta de diamante, microforjamento, microfresamento e a combinação dos dois últimos. O método estocástico de polimento foi usado para gerar acabamento óptico e compará-lo ao torneamento com SPDT. As análises metrológicas qualitativas e dimensionais foram conduzidas com o uso do MEV e da perfilometria óptica. No torneamento de ultraprecisão com ferramenta de diamante foi comprovada a presença do fenômeno conhecido como \"stick slip\" nos degraus da zona de Fresnel, corrigidos alterando-se o projeto. Para os arranjos de empacotamento completo os valores da rugosidade foram mais elevados em função da interatividade das lentes adjacentes do conjunto com \'fi\' = 100%, chegando até mesmo a causar microfraturas na estrutura das microlentes. Após sucessivos processos de calibragem, foram manufaturadas as réplicas pelas técnicas de termomoldagem e moldagem por injeção. Os resultados de replicação das microlentes mostraram que a razão de aspecto e a relação superfície/volume influenciaram significativamente na fidelidade de replicação das microlentes, sendo constatado que as lentes de Fresnel com altura variável possuem maior volume em relação às de altura constante e, consequentemente, melhor fidelidade na replicação. Na termomoldagem, as variações nas dimensões das cristas foram de nanômetros e a fidelidade no processo foi de aproximadamente 100% para todas as zonas de Fresnel. Nesta técnica, porém, os tempos de ciclos são até 40 vezes maiores que os da moldagem por injeção. As investigações paraxiais de FTM para a microlente de Fresnel com altura variável convexa foram de 85,2 % para 25 lp/mm, 67,5% para 50 lp/mm e 71,2% para 75 lp/mm. A simulação por elementos finitos foi usada para auxiliar nos estudos conferindo a sensibilidade do método de cálculo numérico do simulador nas escalas macroscópicas e microscópicas. No final, investigado o desgaste da aresta de corte da ferramenta, verificou-se o desgaste de flanco e a formação da APC, constituída de partículas do cavaco de cobre com formação lamelar. Conclui-se que é possível reproduzir diversos tipos de µEODs com métodos de produção em massa da moldagem por injeção tomando-se cuidado com as variáveis do processo, geometria da peça e propriedades físicas e químicas do material a ser replicado.
Diffractive optical elements represent a fast growing market, in order of billions dollars. Its use is employed in microelectronics, illumination systems, telecommunications, security devices, and others. For this reason, this thesis aimed to make depth public research in the subject. Electrolytic copper inserts were used for providing excellent surface finish when machined with monocrystalline diamond tool getting values of Ra = 10,2 nm, Rq = 13,56 e Rt = 363,06 µm, for the polished stainless steel the results were Ra = 7,02 nm, Rq = 9,05 nm e Rt = 225,19 nm. The replicas were built in PMMA - DH ECL P with light transmittance approximately 90% for visible and infrared spectrum. Seven types of diffractive optical microelements were produced, based in Fresnel geometry and spherical microlens array. For this, it was necessary to develop the computer code called LF2010 to support the construction design of aspheric Fresnel microlenses and calculate its phase transformation function. Four deterministic manufacturing processes of µDOEs were used: ultraprecision diamond turning, microforging, micromilling and the combination of the two last. Stochastic method of polishing was used to obtain mirror surface roughness and compare to SPDT. The qualitative analysis and dimensional metrology were conducted using MEV and optical profiling system respectively. In ultraprecision diamond turning has proved the presence of the phenomenon known as stick slip on the steps of Fresnel zone that was corrected by changing the design. For complete packaging arrays the roughness values were higher due the interaction of adjacent lenses of set with \'fi\' = 100% have even cause microfractures in the structure of microlenses. After successive calibration procedures in the manufacture of copper inserts, replicas were fabricated by techniques of hot emboss and injection molding. The results of microlenses replication showed that the aspect ratio and surface/volume ratio affected the fidelity replication of microlenses, and had been noted that the Fresnel lenses with variable height have higher volume in relation to constant height and consequently better fidelity in replication. Hot emboss process show little variations in the dimensions of the crests, in order of few nanometers, resulting a fidelity approximately 100% for all zones of Fresnel, however the cycle\'s technique are up to 40 times higher than injection molding. The paraxial FTM analysis shows 85,2% for 25 lp/mm, 67,5% for 50 lp/mm and 71,2% for 75 lp/mm to convex Fresnel microlens with variable height. Finite element analysis was used to aid in the studies giving the sensitivity of numerical method adopted in terms of macroscale and microscale. In the end, the wear of edge cutting tool was investigated and found wear flank and formation of built up edge that was made up of chip particles of copper, witch were formed continuously with segmented structure lamellar. Hence, after numerous studies and analysis we can conclude that it is possible to construct µDOEs by means of mass production methods of injection molding taking care of process variables, part geometry and physical and chemical properties of material being replicated.
Diffractive optical elements represent a fast growing market, in order of billions dollars. Its use is employed in microelectronics, illumination systems, telecommunications, security devices, and others. For this reason, this thesis aimed to make depth public research in the subject. Electrolytic copper inserts were used for providing excellent surface finish when machined with monocrystalline diamond tool getting values of Ra = 10,2 nm, Rq = 13,56 e Rt = 363,06 µm, for the polished stainless steel the results were Ra = 7,02 nm, Rq = 9,05 nm e Rt = 225,19 nm. The replicas were built in PMMA - DH ECL P with light transmittance approximately 90% for visible and infrared spectrum. Seven types of diffractive optical microelements were produced, based in Fresnel geometry and spherical microlens array. For this, it was necessary to develop the computer code called LF2010 to support the construction design of aspheric Fresnel microlenses and calculate its phase transformation function. Four deterministic manufacturing processes of µDOEs were used: ultraprecision diamond turning, microforging, micromilling and the combination of the two last. Stochastic method of polishing was used to obtain mirror surface roughness and compare to SPDT. The qualitative analysis and dimensional metrology were conducted using MEV and optical profiling system respectively. In ultraprecision diamond turning has proved the presence of the phenomenon known as stick slip on the steps of Fresnel zone that was corrected by changing the design. For complete packaging arrays the roughness values were higher due the interaction of adjacent lenses of set with \'fi\' = 100% have even cause microfractures in the structure of microlenses. After successive calibration procedures in the manufacture of copper inserts, replicas were fabricated by techniques of hot emboss and injection molding. The results of microlenses replication showed that the aspect ratio and surface/volume ratio affected the fidelity replication of microlenses, and had been noted that the Fresnel lenses with variable height have higher volume in relation to constant height and consequently better fidelity in replication. Hot emboss process show little variations in the dimensions of the crests, in order of few nanometers, resulting a fidelity approximately 100% for all zones of Fresnel, however the cycle\'s technique are up to 40 times higher than injection molding. The paraxial FTM analysis shows 85,2% for 25 lp/mm, 67,5% for 50 lp/mm and 71,2% for 75 lp/mm to convex Fresnel microlens with variable height. Finite element analysis was used to aid in the studies giving the sensitivity of numerical method adopted in terms of macroscale and microscale. In the end, the wear of edge cutting tool was investigated and found wear flank and formation of built up edge that was made up of chip particles of copper, witch were formed continuously with segmented structure lamellar. Hence, after numerous studies and analysis we can conclude that it is possible to construct µDOEs by means of mass production methods of injection molding taking care of process variables, part geometry and physical and chemical properties of material being replicated.
Palavras-chave
Termomoldagem, Simulação por elementos finitos CAE na moldagem por injeção, Projetos de lentes CAD, Microtorneamento com ferramenta de diamante, Microinjeção, Microfresagem, Microforjamento, Micro elementos ópticos difrativos (µEODs), Metrologia óptica dimensional e paraxial, Manufatura, Integridade superficial, Surface integrity, Diffractive optical microelements (DOE), Finite element analysis (FEA), Optical and paraxial metrology, Hot emboss, Micromilling, Microinjection, Lenses design (CAD), Manufacturing, Microforging, Diamond tool microturning