Estatísticas para In situ study of residual stress evolution in Zr(C,N)/α-Al2O3 and Zr(C,N)/κ-Al2O3 CVD multilayers during thermal cycling

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In situ study of residual stress evolution in Zr(C,N)/α-Al2O3 and Zr(C,N)/κ-Al2O3 CVD multilayers during thermal cycling 3

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